Nano Lithography (ISTE) by Stefan Landis English | ISBN: 1848212119 | 2011 | 320 pages...
Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures − meaning the creation of patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. It is used in the fabrication of leading-edge semiconductor integrated circuits...
